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1

Flip-chip fabrication of advanced micromirror arrays

M. Adrian Michalicek, Victor M. Bright

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 1.27 MB

english, 2002

2

Surface-micromachined polysilicon MOEMS for adaptive optics

John Comtois, Adrian Michalicek, William Cowan, Jeffrey Butler

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 3.08 MB

english, 1999

3

Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon

John H. Comtois, M. Adrian Michalicek, Carole Craig Barron

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 1.09 MB

english, 1998

4

SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Miniaturized Systems with Micro-Optics and MEMS - Micromirror arrays fabricated by flip-chip assembly

Michalicek, M. Adrian, Zhang, Wenge, Harsh, Kevin F., Bright, Victor M., Lee, Y. C., Motamedi, M. Edward, Goering, Rolf

Year:

1999

Language:

english

File:

PDF, 6.85 MB

english, 1999

5

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MOEMS and Miniaturized Systems II - Development of advanced micromirror arrays by flip-chip assembly

Michalicek, M. Adrian, Bright, Victor M., Motamedi, M. Edward, Goering, Rolf

Year:

2001

Language:

english

File:

PDF, 2.36 MB

english, 2001

6

SPIE Proceedings [SPIE Astronomical Telescopes & Instrumentation - Kona, HI (Friday 20 March 1998)] Adaptive Optical System Technologies - Design and simulation of advanced surface micromachined micromirror devices for telescope adaptive optics applictions

Michalicek, M. Adrian, Clark, Natalie, Comtois, John H., Schriner, Heather K., Bonaccini, Domenico, Tyson, Robert K.

Year:

1998

Language:

english

File:

PDF, 4.12 MB

english, 1998

7

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MOEMS and Miniaturized Systems II - Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism

Michalicek, M. Adrian, Bright, Victor M., Motamedi, M. Edward, Goering, Rolf

Year:

2001

Language:

english

File:

PDF, 1003 KB

english, 2001

8

SPIE Proceedings [SPIE Optoelectronics and High-Power Lasers & Applications - San Jose, CA (Saturday 24 January 1998)] Miniaturized Systems with Micro-Optics and Micromechanics III - Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process

Michalicek, M. Adrian, Comtois, John H., Schriner, Heather K., Motamedi, M. Edward, Goering, Rolf

Year:

1998

Language:

english

File:

PDF, 2.90 MB

english, 1998

9

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications - Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators

Comtois, John H., Bright, Victor M., Gustafson, Steven C., Michalicek, M. Adrian, Bailey, Wayne, Motamedi, M. Edward, Luo, Fang-Chen

Year:

1995

Language:

english

File:

PDF, 1.17 MB

english, 1995

10

SPIE Proceedings [SPIE Optoelectronics and High-Power Lasers & Applications - San Jose, CA (Saturday 24 January 1998)] Spatial Light Modulators - Design and testing of polysilicon surface-micromachined piston micromirror arrays

Cowan, William D., Bright, Victor M., Lee, Max K., Comtois, John H., Michalicek, M. Adrian, Sutherland, Richard L.

Year:

1998

Language:

english

File:

PDF, 1.83 MB

english, 1998

11

SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 19 July 1998)] Photonics for Space Environments VI - Geometry versus optical performance of micromirrors and arrays

Michalicek, M. Adrian, Comtois, John H., Schriner, Heather K., Taylor, Edward W.

Year:

1998

Language:

english

File:

PDF, 1.33 MB

english, 1998

12

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)

Craig Barron, Carole, Davies, Brady R., Sniegowski, Jeffry J., Rodgers, M. Steven, Comtois, John H., Michalicek, M. Adrian, Chang, Shih-Chia, Pang, Stella W.

Year:

1997

File:

PDF, 1.83 MB

1997

13

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MOEMS and Miniaturized Systems II - Fabrication of five-level ultraplanar micromirror arrays by flip-chip assembly

Michalicek, M. Adrian, Bright, Victor M., Motamedi, M. Edward, Goering, Rolf

Year:

2001

Language:

english

File:

PDF, 924 KB

english, 2001

14

SPIE Proceedings [SPIE Astronomical Telescopes & Instrumentation - Kona, HI (Friday 20 March 1998)] Adaptive Optical System Technologies - Silicon adaptive optic systems using micromirrors

Clark, Natalie, Furth, Paul, Whitfield, Gregory N., Comtois, John H., McKecknie, Stuart, Michalicek, M. Adrian, Bonaccini, Domenico, Tyson, Robert K.

Year:

1998

Language:

english

File:

PDF, 5.27 MB

english, 1998

15

SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA, United States (Sunday 27 July 1997)] Photonics for Space Environments V - Radiation-induced effects research in emerging photonic technologies: vertical cavity surface emitting lasers, GaN light-emitting diodes, and microelectromechanical devices

Taylor, Edward W., Taylor, Edward W., Paxton, Alan H., Schone, Harald, Comtois, John H., Sanchez, Anthony D., Michalicek, M. Adrian, Winter, James E., McKinney, Stanley J., Osinski, Marek, Perlin, Pio

Year:

1997

Language:

english

File:

PDF, 734 KB

english, 1997

16

SPIE Proceedings [SPIE Optoelectronics and High-Power Lasers & Applications - San Jose, CA (Saturday 24 January 1998)] Spatial Light Modulators - Development of advanced second-generation micromirror devices fabricated in a four-level planarized surface-micromachined polycrystalline silicon process

Michalicek, M. Adrian, Comtois, John H., Schriner, Heather K., Sutherland, Richard L.

Year:

1998

Language:

english

File:

PDF, 1.81 MB

english, 1998

17

[AIP Space technology and applications international forum -1999 - Albuquerque, New Mexico (USA) (31 Jan - 4 Feb 1999)] AIP Conference Proceedings - Optimized micromirror arrays for adaptive optics

Michalicek, M. Adrian, Comtois, John H., Hetherington, Dale L.

Year:

1999

Language:

english

File:

PDF, 2.23 MB

english, 1999